Basic Part Information
Part No.: 163166
Brand: FESTO (German brand for pneumatic automation)
1.1 Full Product Designation
CPV10-M1H-5LS-M7
1.2 Product Classification
Single valve slice for CPV10 series compact micro valve terminal, 5/2-way single solenoid valve
- Model Code Breakdown: CPV10-M1H-5LS-M7
- CPV10: Valve terminal size, 10 mm width compact micro valve
- M1H: Single solenoid with mechanical spring return, standard DC coil
- 5: 5-way valve (2 supply ports / 2 working ports / 1 exhaust port)
- LS: Short exhaust silencing structure, low-noise exhaust
- M7: Port thread M7×0.5
- Core Pneumatic & Electrical Specifications
Pneumatic Specifications
Valve function: 5/2-way single acting (spring return)
Operating pressure: 0.2~0.8 MPa
Nominal supply pressure: 0.6 MPa
Port sizing: Working ports M7; supply & exhaust ports M7
Nominal flow rate: 190 L/min @ 6 bar
Exhaust structure: Integrated short silencer (LS type), no external muffler required
Medium: Dry compressed air, filtration grade 40 μm
Electrical Specifications
Standard coil voltage: 24 V DC (standard delivery)
Power consumption: 1.8 W
Protection class: IP65 (with standard plug)
Wiring: Standard M8 electrical plug
- Dimensions & Mounting
- Mounting type: Modular stacking on CPV10 valve terminal sub-base, integrated multi-valve control
- Valve width: 10 mm, ultra-compact, ideal for mini automation equipment
- Overall dimensions: L 52 mm × W 10 mm × H 30 mm
- Fixing: Slot snap-fit installation on terminal base, tool-free assembly & disassembly
- Typical Application Scenarios
- Mini cylinder actuation control for 3C electronic tooling fixtures
- Mini cylinder drive for small conveyor lines & sorting equipment
- Pneumatic micro-devices for medical equipment & laboratory instruments
- Mini gripper & ejector cylinder control on packaging machinery
- Micro pneumatic actuators for semiconductor equipment
- Replacement & Spare Part Information
- Interchangeability within series: All CPV10 valve slices are directly interchangeable on matching sub-bases
- Wear spare parts:
Coil assembly: Separate 24 V DC coil assemblies available for individual ordering
Seal repair kit: Universal CPV10 seal service kit
- Equivalent alternative model (same dimension, different exhaust):
163167: CPV10-M1H-5LO-M7 (LO = long exhaust channel)
- Procurement SEO Keywords
FESTO 163166, CPV10 solenoid valve, 10 mm micro valve terminal, M7 thread 5/2-way single solenoid valve, compact pneumatic solenoid valve, micro cylinder control valve for automation
- Identification & Selection Pitfall Reminders
163166 = LS short exhaust; 163167 = LO long exhaust. They differ in exhaust flow rate & noise level, and cannot be fully substituted for each other.
Only compatible with CPV10 valve terminal sub-bases; incompatible with wider CPV14 / CPV18 valve terminals.
Complete Product Line Catalogue of FESTO Valve Terminals (Generation + Classification + Core Models + Compatible Valve Slices)
- General Classification of Valve Terminal Series (by launch generation & positioning)
1.1 Classic Compact Micro Series (Small machinery, 3C electronics, medical; 163166 belongs to CPV10 slices)
(1) Original Modular CPV Valve Terminals (World’s first valve terminal, largest installed base)
Sub-ranges (valve width + matching valve slice part numbers)
- CPV10 (10 mm width, M7 thread; series of part No.163166)
Terminal sub-base models: CPV10-VI, CPV10-MP, CPV10-FB, CPV10-ASI
Common 5/2-way single solenoid slices:
163166 CPV10-M1H-5LS-M7 (LS short exhaust)
163167 CPV10-M1H-5LO-M7 (LO long exhaust)
163164 Double solenoid CPV10-M2H-5/2-M7
Port thread: M7×0.5; Flow rate 190 L/min; Max. 8 valve positions per terminal
- CPV14 (14 mm width, G1/8 thread)
Sub-bases: CPV14-VI/MP/FB
Valve slices: 161360, 161361, 161362
Flow rate 350 L/min, suitable for medium-small cylinders
- CPV18 (18 mm width, G1/8 high flow)
Sub-bases: CPV18-VI/MP
Valve slices: 162800, 162801
Flow rate 600 L/min
- CPV-SC Ultra-mini valve terminals dedicated to vacuum (mini suction cups, semiconductors)
(2) CPA Economy Basic Valve Terminals (Low-cost legacy series, phasing out)
Three width sizes: CPA10, CPA14, CPA18
Sub-base models: CPA10-VI, CPA14-MP
Features: D-SUB multi-pin connection only, no native fieldbus; low cost, same flow rating as CPV
(3) VTOC Ultra-flat Micro Valve Terminals (Medical, lab, precision equipment)
Models: VTOC-10, VTOC-14
Ultra-thin body, flat cable outlet, IO-Link communication, low power consumption, M5 micro ports
1.2 General-Purpose Mid-Size Valve Terminals (Packaging, assembly automation, standard machine tools; VTUG is first choice for new projects)
(1) VTUG Plug-in Universal Valve Terminals (Flagship series post-2020, hot-swappable slices)
Three interchangeable valve widths on a single terminal: 10.5 / 16 / 18 mm
- Pneumatic manifold prefix: VABM-L1
VABM-L1-10AS-M5-XX (10.5 mm, M5, XX = valve positions 1~24)
VABM-L1-10HW-M7-XX (10.5 mm, M7)
VABM-L1-14S-G18-XX (16 mm, G1/8)
VABM-L1-18S-G14-XX (18 mm, G1/4)
- Electrical end plates (communication interfaces)
VTUG-F1A-MP: D-SUB multi-pin
VTUG-F1A-FB: Profinet / EtherNet/IP fieldbus
VTUG-F1A-IL: IO-Link master
- Matching VUVG plug-in slices (no manifold disassembly required for replacement)
VUVG-L10-M52-MT-G18 (10.5 mm 5/2-way single solenoid)
VUVG-L14-M52-AT-G18 (16 mm)
VUVG-L18-M52-RT-G14 (18 mm high flow)
- Specifications: Max. 24 valve positions per terminal, IP65 protection, hot-swap support, peak flow 1200 L/min
(2) MPA High-Modular Valve Terminals (Heavy assembly, automotive lines, multi-expansion I/O)
Split into MPA-S (compact) & MPA-L (extended high flow)
- Sub-base models: MPA-VI, MPA-CPI-VI, MPA-FB, MPA-ASI
- Valve widths: 12/16/24 mm; Ports G1/8 ~ G3/8
- Matching slices: MPA12 / MPA16 / MPA24 series solenoid valves
- Advantages: Stackable with CPX remote I/O modules; integrated proportional valves, vacuum generators, soft-start valves
1.3 Heavy-Duty High-Flow Valve Terminals (Automotive welding, stamping, heavy industry, large-bore cylinders)
VTSA / VTSA-F Industrial Heavy-Duty Valve Terminals
- Sizing widths: 18/26/42/52/65 mm (max port thread G1/2)
- Sub-base models: VTSA-MP (multi-pin), VTSA-F-MP, VTSA-FB (fieldbus), VTSA-F-ASI
- Integrated functions: Built-in VAFB soft-start valves, exhaust throttles, safety monitoring valves
- Max flow rate 4000 L/min, IP65 protection, dust & oil resistance; up to 32 valve positions per terminal
- Electrical expansion: Direct pairing with CPX fieldbus terminal modules for digital & analog I/O extension
1.4 New-Generation Unified Flagship Platform (2023 New VTUX, integrates CPV/MPA/VTUG all-in-one)
VTUX Full-Compatible Modular Valve Terminals (Optimal recommendation for new projects)
- Core sub-bases: VTUX-SUB (compact base), VTUX-HUB (high-flow base)
- Communication modules:
VTUX-MP: Multi-pin plug
VTUX-EP: Ethernet fieldbus (Profinet / EtherCAT)
VTUX-IL: IO-Link
CPX-AP-I / AP-A: AP high-speed bus (for distributed remote valve terminals)
- Slice compatibility: Shared VUVG slices with VTUG; mixed mounting of 10.5/16/18 mm widths
- Key highlights:
Max. 128 valve positions per terminal, integrated 16-channel vacuum supply
IP65/IP67 protection; mountable directly on robot wrists & welding stations
Lightweight design, supports distributed decentralized installation; AP bus max. cable length 50 m
- Derivatives: VTUX-EXT extension modules, VTUX-VAC integrated vacuum modules
1.5 Special Purpose Valve Terminal Series
- VTEP Piezo Proportional Valve Terminals: Semiconductor, lithium battery, precision pressure regulation; multi-channel micro-flow pressure control
- VTIA Function-Integrated Valve Terminals: Built-in filter, pressure regulator & vacuum generator, all-in-one unit
- VSPA Pilot-Operated Valve Terminals: Explosion-proof environments without electromagnetic coils, fully pneumatic control
- VSNC NAMUR Mounted Valve Terminals: Matched to process valve actuators, with explosion-proof certifications
- Universal Electrical Communication End Plates for All Valve Terminal Series (Unified CPX Fieldbus Platform by FESTO)
CPX is FESTO’s unified remote I/O & fieldbus platform, compatible with CPV/MPA/VTSA/VTUX series
- CPX-FB11: Profibus-DP
- CPX-FB32: Profinet IO
- CPX-FB33: EtherNet/IP
- CPX-FB36: EtherCAT
- CPX-ASI: AS-i bus
- CPX-IL: IO-Link master station
- CPX-AP-I: AP distributed bus (paired with VTUX)
- Selection Parameter Comparison Table for All Series Valve Terminals
| Series | Valve Width | Max. Valve Positions | Max Flow per Valve | Protection Class | Typical Applications |
| CPV10 | 10 mm, M7 | 8 | 190 L/min | IP65 | 3C mini fixtures, medical equipment |
| VTUG | 10.5/16/18 mm | 24 | 1200 L/min | IP65 | Packaging, general automation |
| MPA | 12/16/24 mm | 24 | 1600 L/min | IP65 | Automotive assembly, multi-I/O expansion |
| VTSA | 18~65 mm | 32 | 4000 L/min | IP65 | Welding, stamping, heavy industry |
| VTUX | 10.5/16/18 mm | 128 | 1300 L/min | IP67 | New machine tools, distributed robot systems |
| VTOC | 10/14 mm flat type | 16 | 220 L/min | IP54 | Laboratory, precision micro equipment |
- Model Nomenclature Code Breakdown (CPV10 as example)
Model: CPV10-M1H-5LS-M7 (Part No.163166)
- CPV: Series identifier
- 10: Valve body width 10 mm
- M1H: Single solenoid spring return; M2H = double solenoid
- 5: 5-way valve; 3 = 3-way valve
- LS: Short exhaust; LO = long exhaust
- M7: Port thread specification
VTUG manifold example: VABM-L1-10AS-M5-8
VABM: Pneumatic manifold base for valve terminal
L1: Single exhaust channel
10: 10.5 mm valve width
AS: Standard base body
M5: Port thread M5
8: 8 valve positions
- Complete Assembled Valve Terminal Model Examples for Procurement
- 8-position CPV10 multi-pin assembly: CPV10-VI-MP-8 + 8 pcs of 163166 valve slices
- 12-position VTUG Profinet fieldbus terminal: VABM-L1-14S-G18-12 + VTUG-F1A-FB
- 16-position heavy-duty VTSA fieldbus terminal: VTSA16-FB-AP
- 16-position EtherCAT distributed VTUX terminal: VTUX-HUB-EP-16 + CPX-AP-I
- Legacy Discontinued Series (Not Recommended for New Projects)
CPA, original CPV fieldbus modules, VIMP, VIF series. Spare parts remain available for after-sales; prioritize VTUG/VTUX for new machine builds.
Full Industry Application Scenarios for FESTO Valve Terminals (Series Matching per Working Condition)
Core value of valve terminals: Integrated multi-channel solenoid valves, centralized air supply, unified fieldbus/multi-pin wiring, space saving, simplified wiring layout. Different series fit micro/high-flow, clean/heavy-duty environments.
- 3C & Consumer Electronics (Main series: CPV10, VTUG 10.5mm, VTOC micro terminals)
Applicable Stations
- Assembly fixtures for mobile phones, tablets, laptops: Mini grippers, ejector cylinders, positioning pins, vacuum suction cups
- Camera & lens module packaging: Micro cylinder fine adjustment, precision handling via vacuum adsorption
- PCB depaneling, component insertion & soldering equipment: Clamping cylinders, air blow cleaning, press-fit mechanisms
- Front-end lithium cell & battery PACK production (small cells): Cell positioning, pole piece cutting, diaphragm compression
Working Condition Features
Small bore cylinders (φ4~φ16), high cycle frequency, compact machine layout, clean oil-free environment.
The 10 mm ultra-thin CPV10 valve (series of 163166) perfectly fits confined fixture spaces.
- Packaging Automation (Main series: VTUG, MPA mid-size terminals)
Applicable Equipment
- Food packaging machines: Bag forming, heat sealing, cutting knives, material pusher & shaping cylinders
- Carton erecting & sealing machines: Flap folding, box pressing, tape cutting, diverter baffles
- Bottling filling & capping machines: Lifting, clamping, positioning, anti-drip air blow
- Bulk bag material sorting & weighing: Sorting shift forks, buffer stop cylinders
Working Condition Features
Medium-flow cylinders, 24-hour continuous operation, compatible with integrated air source filter-regulator modules.
- Automotive Manufacturing (Full series coverage, series selection per production workshop)
- Body Welding & Stamping (Heavy-duty VTSA high-flow terminals)
Fixture clamping, positioning pins, side panel turnover, scrap ejection, safety gate cylinders. Large-bore cylinders with high air consumption, dusty & oily workshop environment.
- Trim & Final Assembly (VTUG / MPA)
Seat assembly, lamp press-fit, door fitting, dashboard positioning, glass adhesive pressing. Supports multi-channel I/O expansion, compatible with proportional valves for clamping force control.
- New Energy Lithium Battery Production Lines (New VTUX terminals, VTEP piezo terminals)
Pole piece die-cutting, winding, stacking, electrolyte filling, hot pressing, cell sorting, vacuum adsorption. High cleanliness requirements; VTUX IP67 rating enables distributed installation on robot wrists.
- Food, Pharmaceutical & Medical Devices (Micro clean terminals: VTOC, CPV10)
- Pharmaceutical filling, blister packaging, tablet sorting, capsule filling
- Medical equipment: Pneumatic units for ventilators, lab analyzers, reagent switching valves
- Aseptic food processing: Cooked food portioning, sterile beverage filling
Special Requirements
Smooth valve body for easy wiping, low air leakage, low-noise LS integrated exhaust slices (e.g. 163166) preferred, no lubricant contamination risk to products, minimal oil emission.
- Logistics Sorting & Warehouse Automation (VTUG, MPA)
- Cross-belt sorters, wheel diverters, diverter gate cylinders
- AS/RS stacker cranes, fork extension, cargo positioning stoppers
- Parcel scanning sorting, carton diversion & rejection mechanisms
Features: High valve position count (8~24 positions), Profinet/EtherCAT fieldbus communication, centralized remote control.
- Machine Tools, Metal Processing & Plastics Industry (VTSA, MPA)
- CNC lathes & machining centers: Workpiece chuck clamping, tailstock stroke, safety door actuation, coolant air blow
- Injection & blow molding machines: Mold core pulling, ejector mechanisms, hopper gate switching, raw material clamping
- Aluminum die-casting & metal grinding: Fixture clamping, dust blow cleaning, scrap pushing
Working conditions exposed to cutting fluid & metal dust; IP65 oil-resistant heavy-duty VTSA terminals recommended.
- Semiconductors & Precision Optics (VTEP piezo terminals, micro CPV10)
- Wafer handling, vacuum chuck platforms, lithography tool pneumatic fine adjustment
- Optical lens grinding & inspection equipment micro pressure regulation
Requirements: Ultra-low flow, high-precision pressure control, low vibration, Class 1000 cleanroom compliance.
- Water Treatment, Environmental Protection & Process Valve Control (VSNC NAMUR terminals, VSPA pilot terminals)
- Pneumatic butterfly valves & diaphragm valve actuation for wastewater treatment
- Flue gas dust removal, desulfurization & denitrification pneumatic actuators
- Remote pneumatic shut-off valves for chemical pipelines
VSPA fully pneumatic terminals available for explosion-proof zones to eliminate electric spark risks without solenoid coils.
- Special Equipment Applications
- Robot wrist mounting: Compact distributed VTUX terminals (lightweight, installed on robot forearms)
- Laboratory analytical instruments & mini inspection equipment: Ultra-thin flat VTOC terminals
- Rail vehicle & coach production lines: VTSA heavy-duty terminals with vibration resistance & wide operating temperature range
- Printing machinery: Paper transport, paper pressing, roller clutch cylinder control
Quick Series-to-Application Matching Table for Valve Terminals
| Terminal Series | Core Application Scenarios | Core Advantages |
| CPV10 (compatible with 163166) | 3C electronics, medical, precision mini fixtures | 10 mm ultra-thin, M7 micro ports, cost-effective |
| VTUG | Packaging, logistics, new general automation machines | Hot-swappable slices, mixed valve widths, complete fieldbus options |
| VTUX (new flagship) | Lithium battery, distributed robot systems, high-end equipment | IP67 protection, AP high-speed bus, max. 128 valve positions |
| MPA | Automotive trim lines, multi-I/O expansion production lines | Stackable digital/analog I/O, integrated proportional valve support |
| VTSA | Welding, stamping, heavy industry large-bore cylinders | Ultra-high flow, dust/oil resistance, heavy-duty durability |
| VTOC/VTEP | Laboratories, semiconductors, precision pressure control | Ultra-flat body, piezo micro-flow precision regulation |
Advantages of Valve Terminals vs Discrete Standalone Solenoid Valves
- Multi-cylinder machines: Dramatically reduce tubing & wiring count, cleaner control cabinet layout
- Fieldbus automated production lines: Single Ethernet cable replaces hundreds of control wires, wiring cycle halved
- Space-restricted machinery: Integrated design drastically cuts installation footprint
- Batch maintenance: Individual slices plug & play replacement without full machine shutdown
Contactor,circuit breaker,solar inverter,electric meter,solar batteries



















NH42-63-318x560.png)




